By John Wolstenholme
This booklet discusses using Auger electron spectroscopy (AES) and scanning Auger microscopy for the characterization of quite a lot of technological fabrics, together with, metals and alloys, semiconductors, nanostructures, and insulators. Its price as a device for high-resolution elemental imaging and compositional intensity profiling is illustrated and the application of the approach for acquiring compositional details from the surfaces, interfaces, and skinny movie buildings of technological and engineering fabrics is verified. This quantity additionally describes the elemental actual ideas of AES in basic, mostly qualitative phrases. significant parts of common Auger spectrometers also are defined. The ebook discusses different kinds of research for which an Auger electron spectrometer can be utilized, for instance, secondary electron microscopy, backscattered electron imaging, X-ray spectroscopy, in addition to the connection among AES and different research suggestions
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Extra resources for Auger electron spectroscopy : practical application to materials analysis and characterization of surfaces, interfaces, and thin films
Perrin. 1925. “Sur les rayons secondaire produits dans un gas par les rayons X” [On the Secondary Rays Produced in a Gas by X-rays]. Comptes Rendus 180, p. 65. A. 1968. ” Journal of Applied Physics 39, p. 1419. J. 1953. ” Physical Review 91, p. 1382. K. C. Tracy. 1969. ” Applied Physics Letters 15, p. 254. 1652989 Persson, L. 1996. ” Acta Oncologica 35, p. 785. L. 1996. Lise Meitner: A Life in Physics. Berkeley, CA: University of California Press. 1 INTRODUCTION In an Auger electron spectrometer, the Auger electrons are emitted from the solid sample surface as a result of the interaction of a beam of highenergy, primary electrons with that surface.
In this figure, the dashed line is that predicted by the equation and the shaded area represents the standard deviation (~30 percent) of the observed data from the predicted line. 6. The variation of the AL with electron kinetic energy according to the Seah and Dench equation (dashed curve) and according to the more recent Seah equation for carbon (upper solid curve) and tungsten (lower solid curve). and ALs had not been refined. 6 provides the AL from experimental data. Since the dashed curve was published, it has been shown that it has a number of shortcomings as an estimate of the AL for many materials.
In addition to this, there is background radiation, which forms a continuum throughout. 4. The kinetic energy spectrum of electrons emitted from an aluminum sample during bombardment with a 3-keV primary electron beam. The Interaction of Electrons with Solid Materials • 19 background spectrum varies, dependent on the sample and beam energy, but there is always background electron emission. The nature of the emission processes that give rise to the peaks in the spectrum will be discussed in detail later, but it will be noted that the intensity of the Auger peak, emitted by the oxygen atoms in the native oxide (the O KLL peak), is very small in comparison with the other features in the spectrum.